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A Unified Physics-Aware Quantum Machine Learning Framework across Power GaN HEMTs and Logic Nanowire FETs: Predicting Unseen Process Splits and Held-Out Geometry Combinations with Lower Error and Tighter Split-to-Split Variability
arXiv – CS AI|Rushat Rai, Yun-Yuan Wang, Autsada Kakaen, Pei-Jie Chang, Doan Viet Nguyen, Yuan-Chieh Chiu, Doldet Tantraviwat, Niall Tumilty, Simon See, Wen-Jay Lee, Tai-Yue Li, Nan-Yow Chen, Tian-Li Wu|
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