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📰 General NeutralImportance 5/10

Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

arXiv – CS AI|Sameer Sadruddin, Eleni Poupaki, Alex Watkins, Bora Karasulu, Adriaan J. M. Mackus, Erwin Kessels, S\"oren Auer, Jennifer D'Souza|
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